Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement

• Cathy Bugot,
• Nathanaëlle Schneider,
• Daniel Lincot and
• Frédérique Donsanti

Beilstein J. Nanotechnol. 2013, 4, 750–757, doi:10.3762/bjnano.4.85

• tuned. Keywords: atomic layer deposition; buffer layer; indium oxi-sulfide; plasma enhancement; thin film solar cells; Introduction Chalcopyrite-type thin film solar cells that are based on a Cu(In,Ga)Se2 (CIGS) absorber have reached high efficiencies, up to 20.3% [1] in 2011 and 20.4% [2] on flexible